Introduction

 Principle & Structure

FGM222 series mass flow controller (Mass Flow Controller) is an intelligent, high-precision gas mass flow controller developed based on the industry-leading micro-electromechanical (MEMS) flow sensor chip, combined with high-speed sampling processing technology and digital compensation algorithm product. The product is equipped with imported electromagnetic proportional valve, 316L stainless steel gas circuit seat, high-precision micro-electromechanical flow chip, etc., which has the characteristics of high precision, fast response speed and good stability. In terms of output, it has an industrial-grade LCD touch screen, with functions such as flow setting, instantaneous flow and cumulative flow display. The output signal can be selected: 4-20mA and 1-5V analog signal, and digital communication methods such as RS485.

Features

  Insensitive to temperature and pressure

  Superior zero point stability

  Super fast response speed

  good repeatability and reproducibility

  Various signal output methods

  LCD touch display and control

  Equipped with high-end imported proportional solenoid valve

  Equipped with high-end imported proportional solenoid valve

application

  semiconductor processing

  combustion control room

  Analysis and Environmental Protection

  vacuum technology

  surface treatment

  Food and Pharmaceutical

  Chemical (petrochemical) and other process control

technical parameter

Parameter Description
Media requirementsClean, dry and non-corrosive gas
type of mediumAir, nitrogen, argon, carbon dioxide, helium, hydrogen, methane, oxygen, etc.
range0-50/100/500/1000SCCM,0-5/20SLM
Accuracy 1% F.S. 
ResolutionMinimum 0.01SCCM
Response time≤1S
environmental conditions
medium temperature0~50℃
Operating temperature-20~70℃
Working humidity10%~90%RH (no icing, no condensation)
work pressure0 ~ 1MPa
Storage temperature-20~85℃
Electrical parameters
Supply voltageDC24V, ripple ≤50mV
Power consumption<3.2W (with screen)
<2.4W (without screen)
Start Time<1S
Preheat time<10mS
Communication Interface
Analog signal (current, voltage)
Interface TypeD-SUB 9-pin
current signal4-20mA (Linear corresponding range)
voltage signal1-5V (Linear corresponding range)
Digital signal (RS485)
Interface TypeRJ45, D-SUB 9-pin
communication rate4800, 9600 (default), 14400, 19200, 38400, 56000, 57600, 115200,
128000, 230400, 256000, 460800, 500000 (can be modified by command or host computer)
AgreementRS485 (default Modbus-RTU, customizable private protocol)
Device address1 (default)-250 (can be modified by command or host computer)
maximum number of nodes250
Mechanical parameters
Connector typeFerrule: 8mm, 12mm, 3/8 inch, Quick Insert: 6mm, 8mm, other optional
The main materialBase: 316L Stainless Steel, Shell: Carbon Steel
sealing materialFKM Fluoroelastomer
weight0.75kg

Selection table

FGM222-Gas Mass Flow Controller

range

50SCCM

100SCCM

500SCCM

1000SCCM

5000SCCM

20000SCCM

signal type

0...5V

RS485

1...5V and 4...20mA

1...5V and RS485

RS485 and 4...20mA

connection process

8mm card sleeve

12mm card sleeve

3/8mm card sleeve

6mm quick plug

8mm quick plug

Customer can customize

The main material

7075 aluminum alloy

1.4435 (316L stainless steel)

display

 no display

has display

Power supply

24VDC±10% DC power supply
The complete data of this selection table, please contact the sales staff or email to sales@kewill-auto.cn for complete samples.
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